Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

Author: Yin Yonggang   Sun Boqian   Han Fengtian  

Publisher: MDPI

E-ISSN: 1424-8220|16|5|711-711

ISSN: 1424-8220

Source: Sensors, Vol.16, Iss.5, 2016-05, pp. : 711-711

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Abstract