Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures

Author: Ren Juan   Ward Michael   Kinnell Peter   Craddock Russell   Wei Xueyong  

Publisher: MDPI

E-ISSN: 1424-8220|16|2|204-204

ISSN: 1424-8220

Source: Sensors, Vol.16, Iss.2, 2016-02, pp. : 204-204

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Abstract