A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

Author： Cao Gang   Wang Xiaoping   Xu Yong   Liu Sheng  

Publisher： MDPI

E-ISSN： 1424-8220|16|8|1286-1286

ISSN： 1424-8220

Source： Sensors, Vol.16, Iss.8, 2016-08, pp. : 1286-1286

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