The Effect of Base Pressure on Crystal Structure and Microstructure of CrN Thin Film Deposited by Reactive Magnetron Sputtering

Publisher： Trans Tech Publications

E-ISSN： 1662-7482|2017|866|301-304

ISSN： 1660-9336

Source： Applied Mechanics and Materials, Vol.2017, Iss.866, 2017-07, pp. : 301-304

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