In Situ Synchrotron X-Ray Topography Observation of Double-Ended Frank-Read Sources in PVT-Grown 4H-SiC Wafers

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2018|924|172-175

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2018, Iss.924, 2018-07, pp. : 172-175

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Abstract