Selective Wet Etching in Fabricating SiGe and Ge Nanowires for Gate-all-Around MOSFETs

E-ISSN： 1662-9779|2018|282|101-106

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2018, Iss.282, 2018-10, pp. : 101-106

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