Publisher: IOP Publishing
E-ISSN: 1361-6439|24|12|125027-125034
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.12, 2014-12, pp. : 125027-125034
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
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