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IOP Publishing

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Influence of the doping level on the porosity of silicon nanowires prepared by metal-assisted chemical etching

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Fabrication of silicon nanowire arrays by near-field laser ablation and metal-assisted chemical etching

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Nano-silver arrays assisted chemical etching and catalysed texturing of silicon wafers for solar cells

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Low-temperature plasma etching of high aspect-ratio densely packed 15 to sub-10 nm silicon features derived from PS-PDMS block copolymer patterns

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