Analysis of flatband voltage shift of metal/high-k/SiO2/Si stack based on energy band alignment of entire gate stack

Publisher: IOP Publishing

E-ISSN: 1741-4199|23|11|117702-117706

ISSN: 1674-1056

Source: Chinese Physics B, Vol.23, Iss.11, 2014-11, pp. : 117702-117706

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Abstract