Temporal evolution of electron density in a low pressure pulsed two-frequency (60 MHz/2 MHz) capacitively coupled plasma discharge

Publisher： IOP Publishing

E-ISSN： 1361-6595|23|6|65046-65053

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.6, 2014-12, pp. : 65046-65053

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