Fast 2D fluid-analytical simulation of ion energy distributions and electromagnetic effects in multi-frequency capacitive discharges

Publisher： IOP Publishing

E-ISSN： 1361-6595|23|6|64003-64014

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.6, 2014-12, pp. : 64003-64014

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O 2 discharges

By Liu Jia Zhang Quan-Zhi Liu Yong-Xin Gao Fei Wang You-Nian

Journal of Physics D: Applied Physics, Vol. 46, Iss. 23, 2013-06 ,pp. : 235202-235209

IOP Publishing

Access to resources Recommend Favorite

Energy distributions of neutrals and charged species in hollow cathode H 2 discharges: a study of fast H atoms

By Jiménez-Redondo Miguel Herrero Víctor J. Tanarro Isabel Carrasco Esther

Plasma Sources Science and Technology, Vol. 22, Iss. 2, 2013-04 ,pp. : 25022-25030

IOP Publishing

Access to resources Recommend Favorite

Analytical model of atmospheric pressure, helium/trace gas radio-frequency capacitive Penning discharges

By Lieberman M A

Plasma Sources Science and Technology, Vol. 24, Iss. 2, 2015-04 ,pp. : 25009-25022

IOP Publishing

Access to resources Recommend Favorite

A Novel Tunable Multi-Frequency Hybrid Vibration Energy Harvester Using Piezoelectric and Electromagnetic Conversion Mechanisms

By Xu Zhenlong Shan Xiaobiao Chen Danpeng Xie Tao

Applied Sciences, Vol. 6, Iss. 1, 2015-12 ,pp. : 10-10

MDPI

Access to resources Recommend Favorite

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

By Schulze J Schüngel E Donkó Z Czarnetzki U

Plasma Sources Science and Technology, Vol. 20, Iss. 1, 2011-02 ,pp. : 15017-15028

IOP Publishing

Access to resources Recommend Favorite