Hybrid subtractive micro-patterning of a self-assembled SiO2 nano/microsphere monolayer

Author: Han Seungyong   Hong Sukjoon   Wanit Manorokul   Kang Bongchul   Han Seungyong   Han Seungyong  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|10|105006-105013

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105006-105013

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