Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper

Author： Tao Kai Miao Jianmin Tang Lihua Hu Xiao Tao Kai

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|10|104014-104024

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 104014-104024

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