Mechanical integrity of a carbon nanotube/copper-based through-silicon via for 3D integrated circuits: a multi-scale modeling approach

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|48|485705-485720

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.48, 2015-12, pp. : 485705-485720

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Abstract