A high-sensitivity biaxial resonant accelerometer with two-stage microleverage mechanisms

Author： Ding Hong Zhao Jiuxuan Ju Bing-Feng Xie Jin

E-ISSN： 1361-6439|26|1|15011-15021

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.26, Iss.1, 2016-01, pp. : 15011-15021

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