Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation

Author： Ramini Abdallah Bellaredj Mohammed L F Younis Mohammad I Ramini Abdallah

E-ISSN： 1361-6439|26|1|15012-15023

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.26, Iss.1, 2016-01, pp. : 15012-15023

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