Influence of ultra-thin TiN thickness (1.4 nm and 2.4 nm) on positive bias temperature instability (PBTI) of high-

Author: Lu-Wei Qi   Hong Yang   Shang-Qing Ren   Ye-Feng Xu   Wei-Chun Luo   Hao Xu   Yan-Rong Wang   Bo Tang   Wen-Wu Wang   Jiang Yan   Hui-Long Zhu   Chao Zhao   Da-Peng Chen   Tian-Chun Ye  

Publisher: IOP Publishing

E-ISSN: 1741-4199|24|12|127305-127308

ISSN: 1674-1056

Source: Chinese Physics B, Vol.24, Iss.12, 2015-12, pp. : 127305-127308

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