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Author: Zhang Bin Seong Baekhoon Nguyen VuDat Byun Doyoung
Publisher: IOP Publishing
E-ISSN: 1361-6439|26|2|25015-25022
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25015-25022
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Abstract
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