Temperature dependence of the scanning performance of an electrostatic microscanner

Author: Ishikawa Noriaki   Ikeda Kentaro   Sawada Renshi  

Publisher: IOP Publishing

E-ISSN: 1361-6439|26|3|35002-35012

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.3, 2016-03, pp. : 35002-35012

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