Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO x film growth

Author： Franz Robert   Clavero César   Kolbeck Jonathan   Anders André  

Publisher： IOP Publishing

E-ISSN： 1361-6595|25|1|15022-15032

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.25, Iss.1, 2016-02, pp. : 15022-15032

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