Structural and Mechanical Properties of Ti-W-N Thin Films by Dual Unbalanced Magnetron Sputtering

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1131|246-250

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1131, 2016-01, pp. : 246-250

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