Influence of Substrate Temperature on Deposition Rate and Optical Properties of Aluminum Oxide Thin Films Prepared by Reactive DC Sputtering Technique

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2016|675|281-284

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2016, Iss.675, 2016-02, pp. : 281-284

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