Characterization of Photoluminescence and Surface Chemistry after Annealing about Si:SiO2 Films Fabricated by Radio Frequency Sputtering

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2016|698|13-18

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2016, Iss.698, 2016-08, pp. : 13-18

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Abstract