Atmospheric pressure chemical vapour deposition of BPSG films from TEOS, 0$_3$, TMB, TMP$_I$: Determination of a chemical mechanism

Publisher： Edp Sciences

E-ISSN： 1764-7177|12|4|37-44

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.12, Iss.4, 2002-06, pp. : 37-44

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