Heteroepitaxial growth of SiC films by carbonization of polyimide Langmuir-Blodgett films on Si

E-ISSN： 2261-236x|98|issue|04002-04002

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.98, Iss.issue, 2017-02, pp. : 04002-04002

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