Impact of thermal annealing on interfacial layer and electrical properties of a-SiNx : H/Si

Author: Singh Sarab Preet   Vijaya Prakash G.   Ghosh S.   Rai Sanjay   Srivastava P.  

Publisher: Edp Sciences

E-ISSN: 1286-4854|90|2|26002-26002

ISSN: 0295-5075

Source: EPL (EUROPHYSICS LETTERS), Vol.90, Iss.2, 2010-05, pp. : 26002-26002

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Abstract