Multislice imaging of integrated circuits by precession X‐ray ptychography

Publisher: John Wiley & Sons Inc

E-ISSN: 2053-2733|74|1|66-70

ISSN: 0108-7673

Source: ACTA CRYSTALLOGRAPHICA SECTION A (ELECTRONIC), Vol.74, Iss.1, 2018-01, pp. : 66-70

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Abstract