Non-conventional routes to SiGe:P/Si(100) materials and devices based on -SiH3 and -GeH3 derivatives of phosphorus: synthesis, electrical performance and optical behavior
Publisher: IOP Publishing
E-ISSN: 1361-6641|30|4|45007-45017
ISSN: 0268-1242
Source: Semiconductor Science and Technology, Vol.30, Iss.4, 2015-01, pp. : 45007-45017
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Abstract