纳米压印技术制备硅基有序一维、二维纳米结构 Fabrication of Si-Based 1D,2D Ordered Nano Structure by Nanoimprint Lithography

Author： 李卫  

Publisher： 汉斯出版社

ISSN： 2161-0924

Source： Modern Physics, Vol.01, Iss.03, 2011-11, pp. : 59-65

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