Author： Alberici S. Coulon D. Joubin P. Mignot Y. Oggioni L. Petruzza P. Piumi D. Zanotti L.
Publisher： Elsevier
ISSN： 0167-9317
Source： Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 558-565
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