Author: Ivanenko L. Filonov A. Shaposhnikov V. Behr G. Souptel D. Schumann J. Vinzelberg H. Plotnikov A. Borisenko V.
Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 209-214
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