Sidewall mobility and series resistance in a multichannel tri-gate MOSFET

Author： Park S.J.   Jeon D-Y   Montès L.   Barraud S.   Kim G-T   Ghibaudo G.  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.28, Iss.6, 2013-06, pp. : 65009-65016

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