Ultra-Shallow Chemical Characterization of Organic Thin Films Deposited by Plasma and Vacuum-Ultraviolet, Using Angle- and Excitation Energy-Resolved XPS

Author: Girard-Lauriault Pierre-Luc  

Publisher: Springer Publishing Company

ISSN: 0272-4324

Source: Plasma Chemistry and Plasma Processing, Vol.31, Iss.4, 2011-08, pp. : 535-550

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Abstract