Effect of substrate temperature on the structure and chemical bonds of carbon films deposited with a mass-separated carbon ion beam

Author: Yamamoto K.   Watanabe T.   Wazumi K.   Koga Y.   Iijima S.  

Publisher: Elsevier

ISSN: 0925-9635

Source: Diamond and Related Materials, Vol.12, Iss.10, 2003-10, pp. : 2088-2092

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