SU-8- and PDMS-based hybrid fabrication technology for combination of permanently bonded flexible and rigid features on a single device

Author： Patel Jasbir N. Gray Bonnie L. Kaminska Bozena Wu Nien-Chen Gates Byron D.

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65029-65038

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