Author: Hung Chia-Hao Wang Wei-Shan Lin Yu-Ching Liu Ting-Wei Sun Jia-Hong Chen Yung-Yu Esashi Masayoshi Wu Tsung-Tsong
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65025-65030
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Abstract
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