Fabrication and evaluation of a free molecule micro-resistojet with thick silicon dioxide insulation and suspension

Author: Palmer Kristoffer   Nguyen Hugo   Thornell Greger  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65006-65014

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