Author： Woon Leng Loh Sampath Kumar Praveen Murphy Ramana Eugene Tan Kiat Swee Jae Woong Choi
Publisher： IOP Publishing
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65005-65011
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