Experimental and numerical study on the optimization of pulse-modulated radio-frequency discharges

Author: He Jin   Hu Jiangtian   Liu Dawei   Zhang Yuan-Tao  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.3, 2013-06, pp. : 35008-35013

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract