The electrical asymmetry effect in capacitively coupled radio-frequency discharges

Author: Czarnetzki U   Schulze J   Schüngel E   Donkó Z  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.20, Iss.2, 2011-04, pp. : 24010-24024

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Abstract