A depth profile study of the structure and strain distribution in chemically grown Cu films on AlN

Author： Martinez-Miranda L.J. Li Y. Chow G.M. Kurihara L.K.

Publisher： Elsevier

ISSN： 0965-9773

Source： Nanostructured Materials, Vol.12, Iss.5, 1999-01, pp. : 653-656

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