Author: Ding F.-R. Vantomme A. He W.-H. Zhao Q. Pipeleers B. Jacobs K. Moerman I. Iakoubovskii K. Adriaenssens G.J.
Publisher: Elsevier
ISSN: 1369-8001
Source: Materials Science in Semiconductor Processing, Vol.6, Iss.4, 2003-08, pp. : 193-195
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