Electrical Activation of Ion Mass Doped Phosphorous

Author: Lee Yong-Woo   Yun Seung-Jae   Son Se Wan   Byun Chang-Woo   Joo Seung-Ki  

Publisher: American Scientific Publishers

ISSN: 1533-4899

Source: Journal of Nanoscience and Nanotechnology, Vol.13, Iss.10, 2013-10, pp. : 7077-7079

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Abstract