Design, Identification and Control of a 2-Degree of Freedom Flexure-Based Mechanism for Micro/Nano Manipulation

Author: Li X.   Tian Y.   Qin Y.   Wang F.   Gao W.   Zhang D.   Eichhorn V.   Fatikow S.  

Publisher: American Scientific Publishers

ISSN: 1941-4900

Source: Nanoscience and Nanotechnology Letters, Vol.5, Iss.9, 2013-09, pp. : 960-967

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Abstract