Reactive low voltage ion plating of aluminium nitride films and their characteristics

Author: Pulker H.K.   Monz K.H.   Danh N.Q.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.257, Iss.1, 1995-02, pp. : 116-124

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract