Mechanisms of polymer film deposition from r.f. discharges of acetylene, nitrogen and helium mixtures

Author： Durrant S.F.   Marcal N.   Bica de Moraes M.A.   Nicola J.H.   Castro S.G.   Vinhas R.C.G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.259, Iss.2, 1995-04, pp. : 139-145

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