Electrical resistance drift of molybdenum silicide thin film temperature sensors

Author: Ho C.H.   Cha Y.H.C.   Prakash S.   Potwin G.   Doerr H.J.   Deshpandey C.V.   Bunshah R.F.   Zeller M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.260, Iss.2, 1995-05, pp. : 232-238

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Abstract