Rapid thermal processed thin films of niobium pentoxide (Nb 2 O 5 ) deposited by reactive magnetron sputtering

Author： Pignolet A.   Mohan Rao G.   Krupanidhi S.B.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.261, Iss.1, 1995-06, pp. : 18-24

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