Copper interconnection integration and reliability

Author: Hu C.-K.   Luther B.   Kaufman F.B.   Hummel J.   Uzoh C.   Pearson D.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.262, Iss.1, 1995-06, pp. : 84-92

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Abstract