Improvement of the crystallinity of AlAs/GaAs superlattices grown on Si substrates by rapid thermal annealing

Author: Woo Y.D.   Lee H.I.   Kang T.W.   Kim T.W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.264, Iss.1, 1995-08, pp. : 1-3

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Abstract